JPH0432587Y2 - - Google Patents
Info
- Publication number
- JPH0432587Y2 JPH0432587Y2 JP15889885U JP15889885U JPH0432587Y2 JP H0432587 Y2 JPH0432587 Y2 JP H0432587Y2 JP 15889885 U JP15889885 U JP 15889885U JP 15889885 U JP15889885 U JP 15889885U JP H0432587 Y2 JPH0432587 Y2 JP H0432587Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure rod
- case
- hole
- leaf spring
- sensor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 25
- 125000006850 spacer group Chemical group 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15889885U JPH0432587Y2 (en]) | 1985-10-16 | 1985-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15889885U JPH0432587Y2 (en]) | 1985-10-16 | 1985-10-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6267227U JPS6267227U (en]) | 1987-04-27 |
| JPH0432587Y2 true JPH0432587Y2 (en]) | 1992-08-05 |
Family
ID=31082819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15889885U Expired JPH0432587Y2 (en]) | 1985-10-16 | 1985-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432587Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6684604B2 (ja) * | 2016-02-10 | 2020-04-22 | ミネベアミツミ株式会社 | 圧力センサを備えた装置 |
| CN116209885A (zh) * | 2020-08-12 | 2023-06-02 | 阿尔卑斯阿尔派株式会社 | 载荷传感器装置 |
-
1985
- 1985-10-16 JP JP15889885U patent/JPH0432587Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6267227U (en]) | 1987-04-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6205861B1 (en) | Transducer having temperature compensation | |
| US5331857A (en) | Pressure transducer | |
| US7832290B2 (en) | Axial force transducer | |
| JPS62191730A (ja) | 圧力センサ | |
| JPH1071560A (ja) | ウエハ加圧装置 | |
| JPH09504100A (ja) | 容量性圧力センサ | |
| JPH08262361A (ja) | ポリゴンミラーの取付構造 | |
| JPH026323Y2 (en]) | ||
| CA1219633A (en) | Magnetic transducer | |
| US4104921A (en) | Piezoelectric acceleration transducer | |
| US5090243A (en) | Preload system for accelerometer | |
| JPH0432587Y2 (en]) | ||
| JPH0432586Y2 (en]) | ||
| EP2458689B1 (en) | Socket for connection between a package and an electronic circuit board | |
| US4869095A (en) | Vibration detecting device | |
| US5247944A (en) | Skin movement detector | |
| US3537318A (en) | Transducer overload protection means | |
| US5239869A (en) | Acceleration detector | |
| JPH10177031A (ja) | 圧電式加速度センサ | |
| JPH0387622A (ja) | 力覚センサ及びその製造方法 | |
| JP2566883Y2 (ja) | 軸力センサ | |
| JPH0439552Y2 (en]) | ||
| KR102498987B1 (ko) | 하중 검출 장치 | |
| JP2558556B2 (ja) | 圧力センサ | |
| JPH0810133B2 (ja) | 位置検出器 |